MEMS Bootcamp

May 28 – May 31, 2002

mems.jpg (9252 bytes)

Boot Camp


GearLaboratory-Based
Industrial Short Course

GearMicromachining Technologies &
Applications

GearHands-on Training

 

Course Dates
Introduction
Course
Content and Schedule
Registration
Information
About
the Instructors
Online
Reservation Form

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Dates:

Pre-Registration
Deadline:     
April
15, 2002
Short Course: May 28 – May 31, 2002

 

Instructors:

Dr.
A. Bruno Frazier
   
Georgia Institute of Technology
Dr.
Mark G. Allen
Georgia Institute of Technology
Dr.
Farrokh Ayazi
Georgia Institute of Technology
Dr.
Peter J. Hesketh
Georgia Institute of Technology
Dr.
Robert J. Huber
University of Utah

 

Introduction:

The MEMS Boot Camp is a four-day laboratory
intensive course focused on practical training in micro systems fabrication technologies
(e.g., micromachining). The course agenda is evenly divided between
laboratory exercises and supporting lectures. The laboratory exercises are
designed to provide hands-on experience with the dominant micro systems
fabrication technologies. The attendees will receive supporting material
including a Laboratory Instructional Manual with details of the individual
laboratory exercises, lecture notes, and a key reference book. The lectures
and laboratory exercises will be led by instructors with combined experience
of over 75 years in the MEMS field

Course Content:

Lectures:

Micro Systems
Technologies
Laboratory Based Training:



Tuesday
Afternoon (
1:00 PM)

  • Introduction to Micromachining
  • Micromachining Materials &
    Properties

Bulk
Micromachining Technologies

  1. Chemical Wet Etching Technologies
    SiliconAnisotropicIsotropic
    Glass MaterialsAnisotropic

    Isotropic

  2. Specialized Wet Etching Technologies
    Electrochemical Etching
    Technologies
    Photochemical Etching
    Technologies
    Silicon-on-Insulator
    Technologies
    Porous Silicon Technologies

Wednesday Morning:

Bulk Micromachining Technologies (cont.)

A.
Dry Etching Technologies
Plasma Etching Technologies
Reactive Ion Etching Technologies
Inductively Coupled Plasma Etching
Cryogenic Etching Technologies
Focused Ion Beam Technologies

B.
Specialized Dry Etching Technologies

C.  Other Bulk
Micromachining Technologies
Dissolved Wafer Technologies

D.  Bulk
Micromachining of Specialized Optical Materials
Quartz
Glasses
Plastics

Surface
Micromachining Technologies

  1. Polysilicon Technologies
  2. Micro Molding Technologies
  3. Micro Electro Forming Technologies
  4. Sacrificial Layer / Structure
    Technologies
  5. Thin Film Technologies

Thursday
Morning:

Surface
Micromachining Technologies (cont.)

  1. Polymer Based Devices / Systems
    Technologies
  2. Sealing Technologies
  3. Micro Channel Technologies
  4. Bonding Technologies
    Anodic Bonding
    Fusion Bonding
    Polymer Bonding
    Metal Bonding

Applications
of Micro Systems Technology

  1. Biomedical Applications
  2. Optical
  3. Electromagnetic Applications
  4. Telecommunications

Friday
Morning:

Monolithic
Micro Systems Technologies

  1. MEMS First Technologies
  2. Integrated Circuit First Technologies

Forum

Panel
Discussion with the Course Instructors

Topic: To Be
Determined based on participant interest.

Packaging
Technologies

  1. Packaging Technologies
  2. Micro Mechanical Sensors and Actuators
  3. Micro Fluidic Devices
  4. Micro Chemical Sensors
  5. Micro Biosensors
  6. Micro Magnetic Sensors and Actuators
  7. Optical Sensors and Actuator

Tuesday
Early Evening:

  • Substrate Cleaning Procedures
  • Silicon Membrane Technologies
  • Isotropic Etching of Silicon and Glass
  • Anisotropic Etching of Silicon and Glass

Wednesday
Afternoon:

  • Micro Molding Technologies
  • Micro Electroforming Technologies
  • Sacrificial Layer Technologies

Thursday
Afternoon:

  • Bonding and Packaging Technologies
  • Micro Structure Release Technologies

Friday
Afternoon:

  • Scanning Electron Microscopy
  • Testing and Characterization

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Registration Information:

 

The
registration fee covers the course materials and luncheon meals.

Option 1: Lecture &
Laboratory Sessions, Option 2: Lecture-only Sessions

 

Early Registration Fee:
(before April 15, 2002)

Option 1: $2295
Option 2: $1595
 
Late Registration Fee:
(after April 15, 2002)
Option 1: $2495
Option 2: $1695
Registration:
(register on-line or contact Dr. B. Frazier)
Dr. Bruno Frazier
Georgia Institute of Technology
School of Electrical & Computer Eng.
777 Atlantic Drive
Atlanta, GA  30332
Hotel Accommodations: Courtyard By Marriott
1132
Techwood Dr.
Atlanta, GA
(404) 607-1112

 

The Georgia Institute of Technology is located
20 minutes from the Hartsfield International Airport.

Taxi,
bus, and rental cars are available at the airport.

Reservation FormOnline Reservation Form

 

 

About the Instructors

 

Dr. A. Bruno Frazier
(Lead Instructor)
Dr. Frazier is an Assistant Professor in the School
of Electrical & Computer Engineering at Georgia Institute of Technology
as well as Director of the Micro Instrumentation Research & Instructional
Laboratories. He has been responsible for the (co-) development and patents
associated with key micro systems fabrication technologies including the
“Poor Man’s LIGA Process” and precision plastics technologies. In
addition, Dr. Frazier has active research projects in the general area of
biomedical micro instrumentation and automotive micro sensor systems.
His current interest include the development of miniaturized bio-analysis
systems, biomedical micro instrumentation, and advanced micro systems
integration technologies for realization of these systems.
Dr. Mark G. Allen Dr. Allen is an Associate Professor in the
School of Electrical & Computer Engineering at Georgia Institute of
Technology.  He is the director of the Micro Sensor and Micro Actuator
Laboratories.  Dr. Allen’s research interest include the development of
micromachining fabrication technologies, micro magnetic sensors and
actuators, and other MEMS related technologies / applications.
Dr. Farrokh Ayazi Dr. Ayazi is an Assistant Professor in the
School of Electrical and Computer Engineering at Georgia Institute of
Technology.  His current research interests are in the areas of Micro
Electro Mechanical Systems (MEMS), silicon micro fabrication technologies,
VLSI analog circuits for sensor readout and control, integration of high
aspect-ratio silicon technologies with CMOS circuits, RF MEMS and integrated
microsystems.

Dr. Peter
Hesketh

Dr. Hesketh is a
Professor in the School of Mechanical
Engineering at Georgia Institute of
Technology.  His current interests focus on biomedical MEMS
instrumentation.  His contributions include the development of novel
micro pump and valves, micro fluidic systems, bio-analysis systems and micro
sensors.

Dr. Robert Huber Dr. Huber has been involved in MEMS related research and development since
the early stages of work in the field. Until recent retirement, Dr. Huber
spent the last 20 years as a Professor of Electrical Engineering at the University
of Utah. His contributions
include the development of chemical / ion sensors, micro neural recording
systems, and the integrated circuits for interfacing with the micro sensors.
In recent years to present, Dr Huber has been collaborating with scientist at
Sandia National Laboratories on MEMS related system development projects.