The MEMS Boot Camp is a four-day laboratory
intensive course focused on practical training in micro systems fabrication technologies
(e.g., micromachining). The course agenda is evenly divided between
laboratory exercises and supporting lectures. The laboratory exercises are
designed to provide hands-on experience with the dominant micro systems
fabrication technologies. The attendees will receive supporting material
including a Laboratory Instructional Manual with details of the individual
laboratory exercises, lecture notes, and a key reference book. The lectures
and laboratory exercises will be led by instructors with combined experience
of over 75 years in the MEMS field
Course Content:
Lectures:
Micro Systems
Technologies
Laboratory Based Training:
Tuesday
Afternoon (1:00 PM)
Introduction to Micromachining
Micromachining Materials &
Properties
Bulk
Micromachining Technologies
Chemical Wet Etching Technologies
SiliconAnisotropicIsotropic
Glass MaterialsAnisotropic
Dr. Frazier is an Assistant Professor in the School
of Electrical & Computer Engineering at Georgia Institute of Technology
as well as Director of the Micro Instrumentation Research & Instructional
Laboratories. He has been responsible for the (co-) development and patents
associated with key micro systems fabrication technologies including the
“Poor Man’s LIGA Process” and precision plastics technologies. In
addition, Dr. Frazier has active research projects in the general area of
biomedical micro instrumentation and automotive micro sensor systems.
His current interest include the development of miniaturized bio-analysis
systems, biomedical micro instrumentation, and advanced micro systems
integration technologies for realization of these systems.
Dr. Mark G. Allen
Dr. Allen is an Associate Professor in the
School of Electrical & Computer Engineering at Georgia Institute of
Technology. He is the director of the Micro Sensor and Micro Actuator
Laboratories. Dr. Allen’s research interest include the development of
micromachining fabrication technologies, micro magnetic sensors and
actuators, and other MEMS related technologies / applications.
Dr. Farrokh Ayazi
Dr. Ayazi is an Assistant Professor in the
School of Electrical and Computer Engineering at Georgia Institute of
Technology. His current research interests are in the areas of Micro
Electro Mechanical Systems (MEMS), silicon micro fabrication technologies,
VLSI analog circuits for sensor readout and control, integration of high
aspect-ratio silicon technologies with CMOS circuits, RF MEMS and integrated
microsystems.
Dr. Peter
Hesketh
Dr. Hesketh is a
Professor in the School of Mechanical
Engineering at Georgia Institute of
Technology. His current interests focus on biomedical MEMS
instrumentation. His contributions include the development of novel
micro pump and valves, micro fluidic systems, bio-analysis systems and micro
sensors.
Dr. Robert Huber
Dr. Huber has been involved in MEMS related research and development since
the early stages of work in the field. Until recent retirement, Dr. Huber
spent the last 20 years as a Professor of Electrical Engineering at the University
of Utah. His contributions
include the development of chemical / ion sensors, micro neural recording
systems, and the integrated circuits for interfacing with the micro sensors.
In recent years to present, Dr Huber has been collaborating with scientist at
Sandia National Laboratories on MEMS related system development projects.
