Emerging MEMS

Emerging MEMS Fabrication Technologies

December 10 – 12, 2003


Laboratory-Based Industrial Short Course


Advanced Micromachining Technologies


Hands-on Training

Emerging MEMS Fabrication Technologies is designed for individuals interested in hands-on training in the latest micro fabrication technologies for MEMS devices / systems. The course will be structured to assume no prior knowledge of the technologies by the participants. The course agenda is evenly divided between laboratory exercises and supporting lectures. Lectures will be given by academic and industrial experts in the field of advanced fabrication technologies for micro systems. A panel discussion with the lectures has been included to address focused areas of interest to the participants. The laboratory exercises are designed to provide hands-on experience with advanced technologies such as laser ablation, stereo lithography, hot embossing, and deep reactive ion etching. The attendees will receive supporting materials including lecture notes and a key technical reference book.

Course Dates

Course Content and Schedule

Registration Information

About the Instructors

Online Reservation Form


Pre-Registration Deadline: Nov. 28, 2003
Short Course: Dec. 10 – 12, 2003


Dr. A. Bruno Frazier ECE Dept. Georgia Institute of Technology
Dr. Mark G. Allen ECE Dept. Georgia Institute of Technology
Dr. Jon S. Colton ME Dept. Georgia Institute of Technology
Dr. David W. Rosen ME Dept. Georgia Institute of Technology

Registration Information:

The registration fee covers the course materials and luncheon meals.

Early Registration Fee: (before November 28, 2003) $1595

Late Registration Fee: (after November 28, 2003) $1795

Registration: (register on-line or contact Dr. B. Frazier)
Dr. Bruno Frazier
Georgia Institute of Technology
School of Electrical & Computer Eng.
777 Atlantic Drive
Atlanta, GA  30332

Hotel Accommodations:
Courtyard By Marriott
1132 Techwood Dr.
Atlanta, GA
(404) 607-1112

The Georgia Institute of Technology is located 20 minutes from the Hartsfield International Airport.
Taxi, bus, and rental cars are available at the airport.
Reservation FormOnline Reservation Form

© 2003 MIRL(Micro Instrumentation Research Laboratory)
Georgia Institute of Technology
All Rights Reserved