MEMS Bootcamp

Laboratory-Based Industrial Short Course

Micromachining Technologies and Applications

Hands-on Training

Dates:

Pre-Registration Deadline:

April 1, 2001

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Short Course:

May 14 – May 18, 2001

Instructors:

Dr. A.
Bruno Frazier

Georgia Institute of Technology

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Dr. Mark G.
Allen

Georgia Institute of Technology

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Dr. Farrokh
Ayazi

Georgia Institute of Technology

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Dr.
Peter J. Hesketh

Georgia Institute of Technology

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Dr. Robert J.
Huber

University of Utah

Introduction:

The MEMS Bootcamp is a four-day laboratory intensive course focused on
practical training in micro systems fabrication technologies (e.g.,
micromachining). The course agenda is evenly divided between laboratory
exercises and supporting lectures. The laboratory exercises are designed to
provide hands-on experience with the dominant micro systems fabrication technologies.
The attendees will receive supporting material including a Laboratory
Instructional Manual with details of the individual laboratory exercises,
lecture notes, and key reference literature. The lectures and laboratory
exercises will be led by instructors with combined experience of over 55
years in the MEMS field

Course Content:

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Lectures:

Micro Systems Technologies
Laboratory Based Training:

Monday Afternoon
(1:00 PM)

• Introduction to
  Micromachining
• Micromachining
  Materials & Properties

Bulk Micromachining Technologies

<![if !supportLists]>A.     <![endif]>Chemical
Wet Etching Technologies
Silicon

Anisotropic
Isotropic
Gallium Arsenide

Anisotropic
Isotropic

<![if !supportLists]>B.     <![endif]>Specialized
Wet Etching Technologies
Electrochemical Etching
Technologies
Photochemical Etching Technologies
Silicon-on-Insulator Technologies
Porous Silicon Technologies

<![if !supportLists]>C.     <![endif]>Dry
Etching Technologies
Plasma Etching Technologies
Reactive Ion Etching Technologies
Inductively Coupled Plasma Etching
Cryogenic Etching Technologies
Focused Ion Beam Technologies

<![if !supportLists]>D.     <![endif]>Specialized
Dry Etching Technologies

<![if !supportLists]>E.      <![endif]>Other
Bulk Micromachining Technologies
Dissolved Wafer Technologies

<![if !supportLists]>F.      <![endif]>Bulk
Micromachining of Specialized Optical Materials
Quartz
Glasses
Plastics

Tuesday Morning:

Surface Micromachining Technologies

<![if !supportLists]>A.     <![endif]>Polysilicon
Technologies

<![if !supportLists]>B.     <![endif]>Micro
Molding Technologies

<![if !supportLists]>C.     <![endif]>Micro
Electro Forming Technologies

<![if !supportLists]>D.     <![endif]>Sacrificial
Layer / Structure Technologies

<![if !supportLists]>E.      <![endif]>Thin
Film Technologies

<![if !supportLists]>F.      <![endif]>Polymer
Based Devices / Systems Technologies

<![if !supportLists]>G.     <![endif]>Sealing
Technologies

<![if !supportLists]>H.     <![endif]>Microchannel
Technologies

Wednesday Morning:

Other Micro Systems Technologies

<![if !supportLists]>A.     <![endif]>Bonding
Technologies
Anodic Bonding
Fusion Bonding
Polymer Bonding
Metal Bonding

<![if !supportLists]>B.     <![endif]>Plastic
Injection Molding Technologies

<![if !supportLists]>C.     <![endif]>Hot
Embossing Technologies

<![if !supportLists]>D.     <![endif]>Replication
Technologies

<![if !supportLists]>E.      <![endif]>3-D
Micro Fabrication Technologies

Thursday Morning:

Monolithic Micro Systems Technologies

<![if !supportLists]>A.     <![endif]>MEMS
First Technologies

<![if !supportLists]>B.     <![endif]>Integrated
Circuit First Technologies

Packaging Technologies

<![if !supportLists]>A.     <![endif]>Packaging
Technologies

<![if !supportLists]>B.     <![endif]>MicroMechanical
Sensors and Actuators

<![if !supportLists]>C.     <![endif]>Microfluidic
Devices

<![if !supportLists]>D.     <![endif]>MicroChemical
Sensors

<![if !supportLists]>E.      <![endif]>MicroBiosensors

<![if !supportLists]>F.      <![endif]>MicroMagnetic
Sensors and Actuators

<![if !supportLists]>G.     <![endif]>Optical
Sensors and Actuators

Applications of Micro Systems Technology

<![if !supportLists]>A.     <![endif]>Biomedical
Applications

<![if !supportLists]>B.     <![endif]>Electromagnetic
Applications

<![if !supportLists]>C.     <![endif]>Telecommunications

<![if !supportLists]>D.     <![endif]>Optical

Friday Morning:

Precision Machining Technologies

<![if !supportLists]>A.     <![endif]>Metal
Jet Deposition Technologies

<![if !supportLists]>B.     <![endif]>Photo
Polymerization Technologies

<![if !supportLists]>C.     <![endif]>Laser
Sintering Technologies

<![if !supportLists]>D.     <![endif]>Jet
Molding Technologies

<![if !supportLists]>E.      <![endif]>Electrical
Discharge Machining

<![if !supportLists]>F.      <![endif]>Stereolithography

<![if !supportLists]>G.     <![endif]>Micro
milling

<![if !supportLists]>H.     <![endif]>Micro
drilling

Forums

<![if !supportLists]>A.
<![endif]>Panel Discussions

<![if !supportLists]>B.
<![endif]>Focus Discussions Relevant to Attendees

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Monday Early Evening:

• Substrate Cleaning
  Procedures
• Silicon Membrane
  Technologies
• Isotropic Etching of
  Silicon and Glass
• Ansiotropic Etching
  of Silicon and Glass

Tuesday Afternoon:

• Micro Molding
  Technologies
• Micro Electroforming
  Technologies
• Sacrificial Layer
  Technologies

Wednesday Afternoon:

• Bonding and Packaging
  Technologies
• Laser Ablation
  Technologies

Thursday Afternoon:

• Scanning Electron
  Microscopy
• Testing and
  Characterization

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Registration Information:

The registration fee covers the course materials and
luncheon meals.

Early Registration Fee:

$2295 (before April 1, 2001)

Late Registration Fee:

$2495 (after April 1, 2001)

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Registration Address:

Dr. Bruno Frazier
Georgia Institute of Technology
School of Electrical & Computer Eng.

777 Atlantic Drive
Atlanta, GA 30332

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Hotel Accommodations:

The Georgian
Terrace
659 Peachtree St. NE
Atlanta, GA
(404) 897-1991

The Georgia Institute of
Technology is located 20 minutes from the Hartsfield International
Airport.  Taxi, bus, and rental cars are available at the airport.

Online
Reservation Form

About the Instructors

Dr. A. Bruno

Frazier

(Lead Instructor)

Dr. Frazier is an Assistant Professor in the School of
Electrical & Computer Engineering at Georgia Institute of Technology as
well as Director of the Micro Instrumentation Research & Instructional
Laboratories. He has been responsible for the (co-) development and patents
associated with key micro systems fabrication technologies including the
“Poor Man’s LIGA Process” and precision plastics technologies. In
addition, Dr. Frazier has active research projects in the general area of biomedical
micro instrumentation and automotive micro sensor systems.

Dr. Mark G.

Allen

Dr. Farrokh

Ayazi

Dr. Ayazi is an Assistant Professor in the School of
Electrical and Computer Engineering at Georgia Institute of Technology. His current research interests are in the
areas of Micro Electro Mechanical Systems (MEMS), silicon microfabrication
technologies, VLSI analog circuits for sensor readout and control,
integration of high aspect-ratio silicon technologies with CMOS circuits, RF
MEMS and integrated microsystems.

Dr. Robert Huber

Dr. Huber has been involved in MEMS related research and development
since the early stages of work in the field. Until recent retirement, Dr.
Huber spent the last 20 years as a Professor of Electrical Engineering at the
University of Utah. His contributions include the development of chemical /
ion sensors, micro neural recording systems, and the integrated circuits for
interfacing with the micro sensors. In recent years to present, Dr Huber has
been collaborating with scientist at Sandia National Laboratories on MEMS
related system development projects.