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MEMS Boot Camp

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Monday Afternoon (1:00 PM) – Lecture

  • Introduction to Micromachining
  • Micromachining Materials and Properties

    Bulk Micromachining Technologiescopper gear

  1. Chemical Wet Etching Technologies
    Silicon (Anisotropic, Isotropic)
    Glass and Plastic Materials(Anisotropic, Isotropic)
  2. Specialized Wet Etching Technologies
    Electrochemical Etching Technologies
    Photochemical Etching Technologies
    Silicon-on-Insulator Technologies
    Porous Silicon Technologies/li>

Monday Early Evening (Laboratory Based Training)

  • Substrate Cleaning Procedures
  • Silicon Membrane Technologies
  • Isotropic Etching of Silicon and Glass
  • Anisotropic Etching of Silicon and Glass

Tuesday (Lecture):

Bulk Micromachining Technologies (cont.)

  1. Dry Etching Technologies
    Plasma Etching Technologies micro needle array
    Reactive Ion Etching Technologies
    Inductively Coupled Plasma Etching
    Cryogenic Etching Technologies
    Focused Ion Beam Technologies
  2. Specialized Dry Etching Technologies
  3. Other Bulk Micromaching Micromaching Technologies
    Dissolved Wafer Technologies
  4. Bulk Micromachining of Specialized Optical Materials
    Quartz, Glasses, Plastics

Surface Micromachining Technologies

  1. Polysilicon Technologies
  2. Micro Molding Technologies
  3. Micro Electro Forming Technologies
  4. Sacrificial Layer / structure Technologies

Tuesday (Laboratory Based Training):

  • Micro Molding Technologies
  • Thick Photoresist Technologies
  • Micro Electroforming Technologies

Wednesday (Lecture):

Surface Micromachining Technologies Cont.

  1. Polymer Based Devices / Systems Technologies
  2. Sealing Technologies
  3. Micro Channel Technologies
  4. Bonding Technologies (Anodic, Fusion, Polymer and Metal Bonding)

Applications of Micro systems Technology copper gear

  1. Biomedical Applications
  2. Electromagnetic Applications
  3. Telecommunications and Optical

Wednesday (Laboratory Based Training):

  • Bonding and Packaging Technologies
  • Micro Structure Release Technologies

Thursday (Lecture):

Monolithic Micro Systems Technologies

  1. MEMS First Technologies
  2. Integrated Circuit First Technologies

    Forum

    Panel Discussion with the Course Instructors..

Thursday Afternoon (Labratory Based Training):

  • Scanning Electron Microscope
  • Testing and Characterization

 

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Georgia Institute of Technology
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