MEMS Boot Camp

Course and Content

Monday Afternoon (1:00 PM) – Lecture

• Introduction to Micromachining
• Micromachining Materials and Properties

  Bulk Micromachining Technologies

1. Chemical Wet Etching Technologies
   Silicon (Anisotropic, Isotropic)
   Glass and Plastic Materials(Anisotropic, Isotropic)
2. Specialized Wet Etching Technologies
   Electrochemical Etching Technologies
   Photochemical Etching Technologies
   Silicon-on-Insulator Technologies
   Porous Silicon Technologies/li>

Monday Early Evening (Laboratory Based Training)

• Substrate Cleaning Procedures
• Silicon Membrane Technologies
• Isotropic Etching of Silicon and Glass
• Anisotropic Etching of Silicon and Glass

Tuesday (Lecture):

Bulk Micromachining Technologies (cont.)

1. Dry Etching Technologies
   Plasma Etching Technologies
   Reactive Ion Etching Technologies
   Inductively Coupled Plasma Etching
   Cryogenic Etching Technologies
   Focused Ion Beam Technologies
2. Specialized Dry Etching Technologies
3. Other Bulk Micromaching Micromaching Technologies
   Dissolved Wafer Technologies
4. Bulk Micromachining of Specialized Optical Materials
   Quartz, Glasses, Plastics

Surface Micromachining Technologies

1. Polysilicon Technologies
2. Micro Molding Technologies
3. Micro Electro Forming Technologies
4. Sacrificial Layer / structure Technologies

Tuesday (Laboratory Based Training):

• Micro Molding Technologies
• Thick Photoresist Technologies
• Micro Electroforming Technologies

Wednesday (Lecture):

Surface Micromachining Technologies Cont.

1. Polymer Based Devices / Systems Technologies
2. Sealing Technologies
3. Micro Channel Technologies
4. Bonding Technologies (Anodic, Fusion, Polymer and Metal Bonding)

Applications of Micro systems Technology

1. Biomedical Applications
2. Electromagnetic Applications
3. Telecommunications and Optical

Wednesday (Laboratory Based Training):

• Bonding and Packaging Technologies
• Micro Structure Release Technologies

Thursday (Lecture):

Monolithic Micro Systems Technologies

1. MEMS First Technologies
2. Integrated Circuit First Technologies

   Forum

   Panel Discussion with the Course Instructors..

Thursday Afternoon (Labratory Based Training):

• Scanning Electron Microscope
• Testing and Characterization