emerging mems course content

emerging mems course content

Emerging MEMS Fabrication Technologies
Course and Content




MEMS Tech.







Wednesday Afternoon (1:00PM) – Lecture

History of Micromachining Technologies & Applications

  • Silicon Micromachining
  • Early Applications
  • Non-Silicon Micromachining
  • Early Micro Systems Applications
  • Integration of Precision Engineering & Micromachining Technologies
  • Technology Integration for Today’s Micro System Applications

Overview of Advanced Micro Systems Fabrication Technologies

  • Plastics TechnologiesViper SLA System
  • Glass Technologies
  • Silicon Technologies
  • Metals Technologies

Laser Ablation Technologies

  • Excimer Lasers
  • YAG & CO&#178

Wednesday Early Evening – Laboratory Training

  • Laser Ablation of Plastics
  • Laser Ablation of Ceramics
  • Post Ablation Cleaning Procedures
  • ICP Deep Etching of Silicon

Thursday Morning & Early Afternoon – Lecture

Precision Machining Technologies

  • Jet Deposition Technologies
  • Laser Sintering Technologies
  • Jet Molding Technologies
  • Electrical Discharge Machining
  • Micro milling / drilling
  • 3-D Micro Fabrication Technologies

Plastics Micro Fabrication Technologies

  • Stereolithography
  • MEMS Replication Technologies
  • Plastic Injection Molding Technologies
  • Hot Embossing Technologies

Emerging Silicon Micro Fabrication Technologies

  • Deep Reactive Ion Etching
  • Electroplated Photoresist
  • Integration of Piezoelectric Devices

Thursday Afternoon – Laboratory Training

  • Precision Injection Molding of MEMS Relevant Plastics
  • Vacuum Lamination
  • Hot Embossing of Plastics

Friday Morning and Early Afternoon – Lecture

System Integration Issues

A. Compatibility of Micro Systems Fabrication Technologies
B. System Requirements
  • Biomedical Systems
  • Optical Micro Systems
  • Automotive Systems
  • Inertial Systems
  • Space-based Systems

System Integration Technologies

  • Micro Fluidic systems
  • Monolithic Micro Systems
  • Hybrid Micro Systems
  • Hybrid Macro-Micro Systems


  • Panel Discussion with Course Instructors
  • Conference Style Technical Presentations on Selected Advanced MEMS
    Fabrication Technologies.

Friday Afternoon – Laboratory Training

  • Stereo Lithography of 3-D Plastic Devices
  • Paralyne Deposition Technologies
  • Bonding and Packaging Technologies


© 2003 MIRL(Micro Instrumentation Research Laboratory)
Georgia Institute of Technology
All Rights Reserved

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