Emerging MEMS Fabrication Technologies
Course and Content

Wednesday Afternoon (1:00PM) – Lecture

History of Micromachining Technologies & Applications

• Silicon Micromachining
• Early Applications
• Non-Silicon Micromachining
• Early Micro Systems Applications
• Integration of Precision Engineering & Micromachining Technologies
• Technology Integration for Today’s Micro System Applications

Overview of Advanced Micro Systems Fabrication Technologies

• Plastics Technologies
• Glass Technologies
• Silicon Technologies
• Metals Technologies

Laser Ablation Technologies

• Excimer Lasers
• YAG & CO&#178

Wednesday Early Evening – Laboratory Training

• Laser Ablation of Plastics
• Laser Ablation of Ceramics
• Post Ablation Cleaning Procedures
• ICP Deep Etching of Silicon

Thursday Morning & Early Afternoon – Lecture

Precision Machining Technologies

• Jet Deposition Technologies
• Laser Sintering Technologies
• Jet Molding Technologies
• Electrical Discharge Machining
• Micro milling / drilling
• 3-D Micro Fabrication Technologies

Plastics Micro Fabrication Technologies

• Stereolithography
• MEMS Replication Technologies
• Plastic Injection Molding Technologies
• Hot Embossing Technologies

Emerging Silicon Micro Fabrication Technologies

• Deep Reactive Ion Etching
• Electroplated Photoresist
• Integration of Piezoelectric Devices

Thursday Afternoon – Laboratory Training

• Precision Injection Molding of MEMS Relevant Plastics
• Vacuum Lamination
• Hot Embossing of Plastics

Friday Morning and Early Afternoon – Lecture

System Integration Issues

A. Compatibility of Micro Systems Fabrication Technologies
B. System Requirements

• Biomedical Systems
• Optical Micro Systems
• Automotive Systems
• Inertial Systems
• Space-based Systems

System Integration Technologies

• Micro Fluidic systems
• Monolithic Micro Systems
• Hybrid Micro Systems
• Hybrid Macro-Micro Systems

Forum

• Panel Discussion with Course Instructors
• Conference Style Technical Presentations on Selected Advanced MEMS
  Fabrication Technologies.

Friday Afternoon – Laboratory Training

• Stereo Lithography of 3-D Plastic Devices
• Paralyne Deposition Technologies
• Bonding and Packaging Technologies